Mechanisms of nanooxidation of Si(100) from atomic force microscopy

The machining characteristics of the nanolithographic process were studied using atomic force microscopy. Nano-oxidation experiments were conducted to investigate the influence that the different experimental parameters had on height, width and the growth rate of the nanowires and nanodots as well as upon the machining efficiency. The experimental parameters included; the applied voltage, humidity, scanning oxidization time, crystalline orientation and the shape of the probe tip. The results indicated that as the oxidization time and the applied voltage were increased, the nanowire’s height and width also increased. ‘Also, a nanowire with increased height was produced when the humidity was higher. Finally as the probe tip began to wear and the tip’s radius increased, a nanowire with a higher height and width was produced. q 2004 Elsevier Ltd. All rights reserved.